Nikon Nexiv Vmr 3020 Manual



Nikon Introduces NEXIV VMR LU Series Measuring System

Vmr

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Apr 18, 2005

Combining Automatic Microscopy and Measuring on a Single Platform

  • Nikon's Confocal NEXIV VMR-K3040ZC addresses the metrology needs of complex IC packages resulting from the enormous demand for reliable semiconductor products. The Confocal NEXIV features a new optical measuring head using confocal capabilities to solve the problem of Z-series measurement.
  • Download User Manual: Nikon NEXIV VMR-6555 CNC Video Measuring System - Service Manuals, User Guide, Reviews, Instruction Manuals and Owners Manuals.

Nikon Instruments Inc. today announced a new addition to their family of high quality CNC video measuring systems. The NEXIV VMR LU Series represents the state-of-the-art in video measuring platforms, seamlessly integrating reflected light microscopy with classical measuring capability. The result is the world's most flexible non-contact video analysis product able to cross over from classic measuring microscopy to sophisticated coordinate measuring. The NEXIV VMR LU products set new industry benchmarks for material characterization analysis, failure analysis, 3D image stacking, and large image composite stitching which allows technicians to increase measurement resolution and use the capabilities of ultra precision Z scanning to stack images for surface profile and form.

Multiple images are precisely acquired utilizing the mechanical automation of the NEXIV VMR System and recombined via software to produce an accurate 3-Dimension image. These optical solutions provide instrument operators with an unprecedented level of image and metrology discrimination in the coordinate space.

Nikon nexiv vmr 3020 manual download

'Digital products are everywhere,' said Michael Metzger, general manager, Industrial Department, Nikon Instruments. 'Cell phones, PDAs, and digital cameras fuel an ever-increasing appetite for better, cheaper, and faster products. To meet the demands of new ultra-high precision manufacturing processes, and material characterization the NEXIV VMR LU Series inspection systems support a wide range of imaging and measurement solutions.'

The NEXIV VMR LU series combine the best of Nikon's compound microscopes, digital technology, computers and precision positioning components, and offer easy operation, faster throughput rates, advanced functions like 3D surface analysis, and new software to improve workflow for video measurement applications utilizing types one through four optical heads.

The NEXIV VMR LU series features Nikon's acclaimed CF LU160 objective lenses, renowned for their ability to deliver brilliant, high-contrast images. The system can perform both dimensional measurement of a work piece via image processing, and observation in a single unit. High sensitivity DIC imaging is possible using a high contrast DIC slider. The LU series supports brightfield, darkfield, DIC & polarized light contrasting microscopy techniques.

The CNC-based motorized nosepiece enables precision microscopy at the best magnification using the optimum objective lens. The Nikon VMR AutoMeasure software includes interactive measurement and teaching wizards, CAD interface functionality, shape analysis capability and data management tools.

Optional software is available which can further enhance productivity by enabling quick data reporting, statistical process control, 3D surface analysis real-time dynamic data exchange, gear evaluation and multilayer image synthesis.

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ABOUT NIKON INSTRUMENTS INC.

Nikon Instruments Inc. is the US microscopy arm of Nikon Healthcare, a world leader in the development and manufacture of optical and digital imaging technology for biomedical applications. For more information, visit https://www.microscope.healthcare.nikon.com/ or contact us at 1-800-52-NIKON.

Press Contact:

Kristina Corso
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Nikon Updated: 2007-06-20

Designed to put the speed and accuracy of video measurement within everyone’s reach.

Nikon's NEXIV VMR-1515 is an automated small-size CNC non-contact measuring instrument featuring TTL Laser height/profile scanning, intelligent pattern recognition and low contrast edge measuring. Geared for smaller parts, it features smaller travel (X, Y, Z) of 150 x 150 x 150mm. A low-cost entry model, the Performa, (without Laser AF and Outer LED Ring Illuminator) is available for video measurement applications.

Type 1,2,3 Models

• 3 models (type: 1, 2, 3) with 5 step zoom magnification to cover different fields of view and resolution requirements

Nikon vmr

• 6 x 6 travel

• 150 X, 150 Y mm travel, and cast Mehanite stage with 150 mm Z

• A long 50mm working distance sufficiently supports measurements of 3D workpieces

• 15x zoom provides wide field of view for rapid search and high magnification for precise measurement. Accurate calibration at all magnifications allows rapid field of view measurements of multiple parameters.

• High-speed TTL Laser AF ensures high-precision AF independent of surface shape (NEXIV VMR-1515 Performa models have only Vision AF, no Laser AF).

• Improved stage accuracy with new lower coefficient of expansion 0.1 micron resolution scales.

• Ideal for Semiconductor packages, Substrates, Stamped parts, Connectors and small parts, Clock parts

Performa Model

Performa is Nikon's most economical model. Features a 6 x 6 travel and has all the same features as the standard VMR-1515 without Laser AF & Outer LED ring illuminator.

Z120X Model (with Maximum Magnification Module)

• 120x optical magnification enables measurements of fine line widths

• High-precision TTL Laser AF features high NA and enables measurements of small height gaps

• Perfect for measurements of high-density, finely-machined workpieces

• Optional Bird’s-Eye View software plots MEMS parts in 3D format

• Ideal for small high-density PCBs, small precision dies and molds, packages (2D + height), MEMS parts

LU Model (universal epi-illuminator/motorized nosepiece)

Nikon nexiv vmr 3020 manual user

• Full range of Nikon CFI60 LU microscope objectives from 5x to 150x

• Supports brightfield, darkfield, DIC, simple polarizing applications

• Motorized quintuple universal nosepiece

• Easy to use software controls all functions of the system

Nikon Nexiv Vmr 3020 Manual User

• Ideal for small-size LCDs, organic EL panels, wafers up to 150mm

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